Mechanical microsensors M. Elwenspoek, R.J. Wiergerink.

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Mechanical microsensors M. Elwenspoek, R.J. Wiergerink.



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Book's title: Mechanical microsensors M. Elwenspoek, R.J. Wiergerink.
Library of Congress Control Number: 00057363
International Standard Book Number (ISBN):3540675825 (alk. paper)
Cataloging Source:DLC, DLC
Authentication Code:pcc
Library of Congress Call Number:TK7875 .E49 2001
Dewey Decimal Classification Number:681/.2$221
Personal Name:Elwenspoek, M. (Miko), 1948-
Publication, Distribution, etc.:Berlin ; New York . Springer, (c)2001.
Physical Description:x, 295 p. : ill. ;, 25 cm.
Title:Microtechnology and MEMS
Bibliography, etc. Note:Includes bibliographical references and index.
Personal Name:Wiegerink, Remco J., 1964-
Rubrics: Detectors
Design and construction
Microelectromechanical systems
Transducers
Silicon
Micromachining

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